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Abstract
Compact modeling of P+ contact resistances is
important for characterization of substrate noise coupling in
mixed-signal System on Chips (SoCs). Existing contact resistance
models can handle uniformly doped bulk or epitaxial substrates.
However, compact contact resistance models feasible for modern
lightly-doped CMOS processes with P-well layers are still unavailable.
This paper presents a new compact resistance model aiming
at solving this problem. A Conformal Mapping(CM) method was
used to derive the closed-form expressions for the resistances in
the model. The model requires no fitting factors, and it is scalable
to layout/substrate parameters. The proposed model can also be
used to predict noise coupling in terms of S-parameters. The
model validation has been done by both EM simulations and
measurements, and satisfactory agreement is found between the
modeled and measured resistances as well as S-parameters.
important for characterization of substrate noise coupling in
mixed-signal System on Chips (SoCs). Existing contact resistance
models can handle uniformly doped bulk or epitaxial substrates.
However, compact contact resistance models feasible for modern
lightly-doped CMOS processes with P-well layers are still unavailable.
This paper presents a new compact resistance model aiming
at solving this problem. A Conformal Mapping(CM) method was
used to derive the closed-form expressions for the resistances in
the model. The model requires no fitting factors, and it is scalable
to layout/substrate parameters. The proposed model can also be
used to predict noise coupling in terms of S-parameters. The
model validation has been done by both EM simulations and
measurements, and satisfactory agreement is found between the
modeled and measured resistances as well as S-parameters.
Original language | English |
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Title of host publication | European Microwave Week 2012 Conference Proceedings |
Publisher | EuMA |
Publication date | 2012 |
ISBN (Electronic) | 978-2-87487-028-6 |
Publication status | Published - 2012 |
Event | European Microwave Integrated Circuits Conference 2012 - Amsterdam, Netherlands Duration: 29 Oct 2012 → 30 Oct 2012 |
Conference
Conference | European Microwave Integrated Circuits Conference 2012 |
---|---|
Country/Territory | Netherlands |
City | Amsterdam |
Period | 29/10/2012 → 30/10/2012 |
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