From Oxygen Adsorption to the Growth of Thin Oxides on Silicon Surfaces
Publication: Research - peer-review › Journal article
| Original language | English |
|---|---|
| Journal | Computational Materials Science |
| Publication date | 2001 |
| Volume | 21 |
| Pages | 481-487 |
| ISSN | 0927-0256 |
| State | Published |
Keywords
- Oxide formation
ID: 43402