Original language | English |
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Journal | Journal of Micromechanics and Microengineering |
Volume | 12 |
Issue number | 4 |
Pages (from-to) | 414-419 |
ISSN | 0960-1317 |
Publication status | Published - 2002 |
A 32-site neural recording probe fabricated by DRIE of SOI substrates
P. Norlin, M. Kindlundh, A. Mouroux, Kenichi Yoshida, U.G. Hofmann
Research output: Contribution to journal › Journal article › Research › peer-review
163
Citations
(Scopus)