Implantation of keV-energy argon clusters and radiation damage in diamond
Publication: Research - peer-review › Journal article
We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, a good agreement for the value of displacement energy for the case of cluster impact is found by comparing the calculated target sputtering and experimentally measured depth of radiation damage.
|Journal||Physical Review B (Condensed Matter and Materials Physics)|
|Publication date||15 Jan 2012|
|Number of pages||4|
- cluster implantation, radiation damage, diamond, graphite
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