Implantation of keV-energy argon clusters and radiation damage in diamond

Publication: Research - peer-reviewJournal article

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We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, a good agreement for the value of displacement energy for the case of cluster impact is found by comparing the calculated target sputtering and experimentally measured depth of radiation damage.
Original languageEnglish
JournalPhysical Review B (Condensed Matter and Materials Physics)
Publication date15 Jan 2012
Volume85
Journal number3
Pages033405
Number of pages4
ISSN1098-0121
DOIs
StatePublished

Keywords

  • cluster implantation, radiation damage, diamond, graphite

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