Original language | English |
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Title of host publication | Proceedings of SPIE, Optical Metrology 2005 : Vol. 5858: Nano- and Micro-Metrology |
Editors | Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma |
Publisher | SPIE - International Society for Optical Engineering |
Publication date | 2005 |
Pages | 57-63 |
Publication status | Published - 2005 |
Event | SPIE, Optical Metrology 2005 - Munich, Germany Duration: 16 Jun 2005 → … Conference number: 5858 |
Conference
Conference | SPIE, Optical Metrology 2005 |
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Number | 5858 |
Country/Territory | Germany |
City | Munich |
Period | 16/06/2005 → … |