Oxidation of the surface of a thin amorphous silicon film

Ana G. Silva, Kjeld Pedersen, Zheshen Li, Per Morgen

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@article{59b5de20474e47229b6550d0a939c614,

title = "Oxidation of the surface of a thin amorphous silicon film",

author = "Silva, {Ana G.} and Kjeld Pedersen and Zheshen Li and Per Morgen",

year = "2011",

month = nov,

doi = "10.1016/j.tsf.2011.04.189",

language = "Dansk",

volume = "520",

pages = "697--699",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "2",

}