Originalsprog | Engelsk |
---|---|
Titel | 12th Micromechanics Europe Workshop, MME, 16-18 September 2001, Cork, Ireland |
Antal sider | 4 |
Publikationsdato | 2001 |
Status | Udgivet - 2001 |
A 32-site neural recording probe fabricated by double-sided deep reactive ion etching of silicon-on-insulator substrates
Peter Norlin, Maria Kindlundh, Aliette Mouroux, Ken Yoshida, Winnie Jensen, Ulrich G. Hofmann
Publikation: Bidrag til bog/antologi/rapport/konference proceeding › Konferenceartikel i proceeding › Forskning