A 32-site neural recording probe fabricated by DRIE of SOI substrates

P. Norlin, M. Kindlundh, A. Mouroux, Kenichi Yoshida, U.G. Hofmann

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

148 Citationer (Scopus)
OriginalsprogEngelsk
TidsskriftJournal of Micromechanics and Microengineering
Vol/bind12
Udgave nummer4
Sider (fra-til)414-419
ISSN0960-1317
StatusUdgivet - 2002

Citationsformater

Norlin, P., Kindlundh, M., Mouroux, A., Yoshida, K., & Hofmann, U. G. (2002). A 32-site neural recording probe fabricated by DRIE of SOI substrates. Journal of Micromechanics and Microengineering, 12(4), 414-419.