Annealing of Radiation Defects in Dual Implanted Silicon

I.P. Kozlov, Vladimir Odzhaev, Vladimir Popok, Vladimir Hnatowicz

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Originalsprog	Engelsk
Tidsskrift	Semiconductor Science and Technology
Vol/bind	11
Udgave nummer	5
Sider (fra-til)	722-725
Antal sider	4
ISSN	0268-1242
Status	Udgivet - 1996
Udgivet eksternt	Ja

AUB Link

@article{45d68cab9e3c4f58b4306636203861c7,

title = "Annealing of Radiation Defects in Dual Implanted Silicon",

author = "I.P. Kozlov and Vladimir Odzhaev and Vladimir Popok and Vladimir Hnatowicz",

year = "1996",

language = "English",

volume = "11",

pages = "722--725",

journal = "Semiconductor Science and Technology",

issn = "0268-1242",

publisher = "IOP Publishing",

number = "5",

}