TY - JOUR
T1 - Anomalous Depth Distribution of Fe and Co Atoms in Polyimide Implanted to High Fluence
AU - Popok, Vladimir
AU - Khaibullin, R.I.
AU - Bazarov, V.
AU - Valeev, Valerij
AU - Hnatowicz, Vladimir
AU - Mackova, Anna
AU - Odzhaev, Vladimir
PY - 2002/5
Y1 - 2002/5
N2 - Polyimide foils were implanted with 40 keV Fe+ and Co+ ions to the fluences of 2.5×1016–1.25×1017 cm−2 at ion current densities of 4, 8 and 12 μA/cm2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up to 25 at.% of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.
AB - Polyimide foils were implanted with 40 keV Fe+ and Co+ ions to the fluences of 2.5×1016–1.25×1017 cm−2 at ion current densities of 4, 8 and 12 μA/cm2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up to 25 at.% of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.
U2 - 10.1016/S0168-583X(02)00635-3
DO - 10.1016/S0168-583X(02)00635-3
M3 - Journal article
SN - 0168-583X
VL - 191
SP - 695
EP - 699
JO - Nuclear Instruments and Methods in Physics Reseach B
JF - Nuclear Instruments and Methods in Physics Reseach B
IS - 1-4
ER -