Boron Electrical Activation in Dual B + N and B + Ar Implanted Silicon

Vladimir Odzhaev, Vladimir Popok, V.S. Prosolovich, Vladimir Hnatowicz

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Originalsprog	Engelsk
Tidsskrift	Applied Physics A: Materials Science & Processing
Vol/bind	62
Sider (fra-til)	355-358
Antal sider	4
ISSN	0947-8396
Status	Udgivet - 1996
Udgivet eksternt	Ja

AUB Link

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title = "Boron Electrical Activation in Dual B + N and B + Ar Implanted Silicon",

author = "Vladimir Odzhaev and Vladimir Popok and V.S. Prosolovich and Vladimir Hnatowicz",

year = "1996",

language = "English",

volume = "62",

pages = "355--358",

journal = "Applied Physics A: Materials Science & Processing",

issn = "0947-8396",

publisher = "Physica-Verlag",

}

TY - JOUR

T1 - Boron Electrical Activation in Dual B + N and B + Ar Implanted Silicon

AU - Odzhaev, Vladimir

AU - Popok, Vladimir

AU - Prosolovich, V.S.

AU - Hnatowicz, Vladimir

PY - 1996

Y1 - 1996

M3 - Journal article

SN - 0947-8396

VL - 62

SP - 355

EP - 358

JO - Applied Physics A: Materials Science & Processing

JF - Applied Physics A: Materials Science & Processing

ER -