Cluster Implantation and Deposition Apparatus: Design and Capabilities

Muhammad Hanif, Vladimir Popok

    Publikation: Bidrag til bog/antologi/rapport/konference proceedingKonferenceartikel i proceedingForskningpeer review

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    Abstrakt

    In the current report, a design and capabilities of a cluster implantation and deposition apparatus (CIDA) involving two different cluster sources are described. The clusters produced from gas precursors (Ar, N etc.) by PuCluS-2 can be used to study cluster ion implantation in order to develop contributions to the theory of cluster stopping in matter as well as for practical applications requiring ultra-shallow implantation and modification of surfaces on the nanoscale. Metal clusters from the magnetron cluster source are of interest for the production of optical sensors to detect specific biological objects (for instance, enzymes and proteins) as well as for the enhancement of photocatalytic reactions, for example, in hydrogen production.
    OriginalsprogEngelsk
    TitelNano-Structures for Optics and Photonics : Optical Strategies for Enhancing Sensing, Imaging, Communication and Energy Conversion
    RedaktørerBaldassare Di Bartolo, John Collins, Luciano Silvestri
    Antal sider3
    UdgivelsesstedDordrecht
    ForlagSpringer Science+Business Media
    Publikationsdato2015
    Sider505-507
    ISBN (Trykt)978-94-017-9142-7
    ISBN (Elektronisk)978-94-017-9133-5
    DOI
    StatusUdgivet - 2015
    BegivenhedProc. Summer School on Nano-Structures for Optics and Photonics - Erice, Italien
    Varighed: 4 jul. 201319 jul. 2013

    Workshop

    WorkshopProc. Summer School on Nano-Structures for Optics and Photonics
    Land/OmrådeItalien
    ByErice
    Periode04/07/201319/07/2013
    NavnNATO Science for Peace and Security Series B: Physics and Biophysics

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