Comparison of Selective Deposition Techniques for Fabricating p+n Ultrashallow Silicon Diodes

Xingyu Liu, Shivakumar D. Thammaiah, Thomas L.M Scholtes, Lis K Nanver

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OriginalsprogEngelsk
TitelProceedings of ICT.OPEN-2016, Semiconductor Advances for Future Electronics and Sensors (SAFE)
Publikationsdato21 mar. 2016
ISBN (Elektronisk)978-90-73461-932
StatusUdgivet - 21 mar. 2016

Citationsformater

Liu, X., Thammaiah, S. D., Scholtes, T. L. M., & Nanver, L. K. (2016). Comparison of Selective Deposition Techniques for Fabricating p+n Ultrashallow Silicon Diodes. I Proceedings of ICT.OPEN-2016, Semiconductor Advances for Future Electronics and Sensors (SAFE)