Differential Amplitude Scanning Optical Microscope Computer Aided for Linewidth Measurements

E.A. Bozhevolnaya; Sergei I. Bozhevolnyi; A.V. Postnikov

Differential Amplitude Scanning Optical Microscope Computer Aided for Linewidth Measurements

E.A. Bozhevolnaya, Sergei I. Bozhevolnyi, A.V. Postnikov

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Originalsprog	Engelsk
Tidsskrift	Applied Optics
Vol/bind	31
Udgave nummer	32
Sider (fra-til)	6836-6839
ISSN	0003-6935
Status	Udgivet - 1992

Emneord

Scanning optical microscopy
Differential contrast imaging
Optical metrology

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Citationsformater

@article{d4f2e3f0809211db8b97000ea68e967b,

title = "Differential Amplitude Scanning Optical Microscope Computer Aided for Linewidth Measurements",

keywords = "Scanning optical microscopy, Differential contrast imaging, Optical metrology, Scanning optical microscopy, Differential contrast imaging, Optical metrology",

author = "E.A. Bozhevolnaya and Bozhevolnyi, {Sergei I.} and A.V. Postnikov",

year = "1992",

language = "English",

volume = "31",

pages = "6836--6839",

journal = "Applied Optics",

issn = "0003-6935",

publisher = "Optical Society of America",

number = "32",

}

TY - JOUR

T1 - Differential Amplitude Scanning Optical Microscope Computer Aided for Linewidth Measurements

AU - Bozhevolnaya, E.A.

AU - Bozhevolnyi, Sergei I.

AU - Postnikov, A.V.

PY - 1992

Y1 - 1992

KW - Scanning optical microscopy

KW - Differential contrast imaging

KW - Optical metrology

KW - Scanning optical microscopy

KW - Differential contrast imaging

KW - Optical metrology

M3 - Journal article

SN - 0003-6935

VL - 31

SP - 6836

EP - 6839

JO - Applied Optics

JF - Applied Optics

IS - 32

ER -