Energetic cluster ion beams: Modification of surfaces and shallow layers

Physics

• Energetics 100%
• Utilization 100%
• Ion Beams 100%
• Molecular Cluster 66%
• Impact 66%
• Surface Reaction 33%
• Kinetic Energy 33%
• Chemical Property 33%
• Radiation Effect 33%
• Crater 33%
• Solids 33%

Engineering

• Shallower 100%
• Energy Engineering 40%
• Fields 40%
• Practical Application 40%
• Experimental Result 20%
• Bulk Material 20%
• Nanometre 20%
• Models 20%
• Engineering 20%
• Mechanisms 20%
• Processing 20%
• Macroscopic Scale 20%
• Surface Erosion 20%
• Bombardment 20%

Material Science

• Surface 100%
• Dry Etching 20%
• Theoretical Modeling 20%
• Paper 20%
• Physical Property 20%
• Chemical Property 20%
• Radiation Damage 20%
• Surface Treatment 20%