Implantation of keV-energy argon clusters and radiation damage in diamond

Vladimir Popok, Juha Samela, Kai Nordlund, Vladimir Popov

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    Abstract

    We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, a good agreement for the value of displacement energy for the case of cluster impact is found by comparing the calculated target sputtering and experimentally measured depth of radiation damage.
    OriginalsprogEngelsk
    TidsskriftPhysical Review B (Condensed Matter and Materials Physics)
    Vol/bind85
    Udgave nummer3
    Sider (fra-til)033405
    Antal sider4
    ISSN1098-0121
    DOI
    StatusUdgivet - 15 jan. 2012

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