Magnetron sputtering cluster apparatus for formation and deposition of size-selected metal nanoparticles

Muhammad Hanif, Vladimir Popok

    Publikation: Bidrag til bog/antologi/rapport/konference proceedingKonferenceartikel i proceedingForskning

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    Abstrakt

    The experimental setup utilizing a DC magnetron sputtering source for production of metal clusters, their size (mass) selection and following deposition in high vacuum is described. The source is capable to form clusters of various metals, for example, copper, silver, gold etc. Cluster size selection is achieved using an electrostatic quadrupole mass selector. The deposited silver clusters are studied using atomic force microscopy. The height distributions show typical relative standard size deviation of 9-13% for given sizes in the range between 5-23 nm. Thus, the apparatus demonstrates good capability in formation of supported size-selected metal nanoparticles with controllable coverage for various practical applications.
    OriginalsprogEngelsk
    TitelPhysics, Chemistry and Applications of Nanostructures : Proceedings of International Conference Nanomeeting-2015. Minsk, May 26-29, 2015
    RedaktørerV.E. Borisenko, S.V. Gaponenko, V.S. Gurin, C.H. Kam
    Antal sider4
    UdgivelsesstedSingapore
    ForlagWorld Scientific
    Publikationsdato2015
    Sider416-419
    ISBN (Trykt)978-981-4696-51-7
    StatusUdgivet - 2015
    BegivenhedInternational Conference Nanomeeting - 2015 - Minsk, Hviderusland
    Varighed: 26 maj 201529 maj 2015

    Konference

    KonferenceInternational Conference Nanomeeting - 2015
    Land/OmrådeHviderusland
    ByMinsk
    Periode26/05/201529/05/2015

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