Nanohillock formation by impact of small low-energy clusters with-surfaces

Vladimir Popok, S. Prasalovich, Eleanor E.B. Campbell

Publikation: Bidrag til tidsskriftTidsskriftartikelpeer review

25 Citationer (Scopus)

Abstrakt

Results on nanoscale structuring of different substrates (silicon, pyrolytic graphite, indium-tin-oxide) using clusters from 20 to 100 atoms in size formed from gaseous precursors (O2, N2, Ar) at relatively low impact energy up to 15 keV are presented. Images of the substrate surfaces after cluster collisions obtained using atomic force microscopy (AFM) show the formation of hillocks from a few to 15 nm height with a basal diameter from 50 to 300 nm depending on implantation conditions. The shape and size of the structures are found to be a function of the cluster size and species, implantation energy, impact angle and the type of substrate. A model explaining the hillock formation is discussed.
OriginalsprogEngelsk
TidsskriftNuclear Instruments and Methods in Physics Reseach B
Vol/bind207
Udgave nummer2
Sider (fra-til)145-153
Antal sider9
ISSN0168-583X
StatusUdgivet - jun. 2003
Udgivet eksterntJa

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