New direction in nanotechnology: Cluster ion beam technique

V. N. Popok; S. V. Prasalovich; E. E B Campbell

doi:10.1109/CRMICO.2003.158920

New direction in nanotechnology: Cluster ion beam technique

V. N. Popok, S. V. Prasalovich, E. E B Campbell

Publikation: Bidrag til bog/antologi/rapport/konference proceeding › Konferenceartikel i proceeding › Forskning

Abstract

A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.

Originalsprog	Engelsk
Titel	2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings
Antal sider	3
Forlag	IEEE
Publikationsdato	1 sep. 2003
Sider	523-525
ISBN (Elektronisk)	966796826X, 9789667968267
DOI	https://doi.org/10.1109/CRMICO.2003.158920
Status	Udgivet - 1 sep. 2003
Udgivet eksternt	Ja
Begivenhed	13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Sevastopol, Crimea, Ukraine Varighed: 8 sep. 2003 → 12 sep. 2003

Konference

Konference	13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003
Land/Område	Ukraine
By	Sevastopol, Crimea
Periode	08/09/2003 → 12/09/2003
Sponsor	et al., FSUE "SCRRTI", Interface-MFG Co., International Charity Fund of Sergei Sit'ko, OJS SPE "Saturn", SRI of Radiomaterials

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10.1109/CRMICO.2003.158920

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Citationsformater

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title = "New direction in nanotechnology: Cluster ion beam technique",

abstract = "A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.",

author = "Popok, {V. N.} and Prasalovich, {S. V.} and Campbell, {E. E B}",

year = "2003",

month = sep,

day = "1",

doi = "10.1109/CRMICO.2003.158920",

language = "English",

pages = "523--525",

booktitle = "2003 13th International Crimean Conference {"}Microwave and Telecommunication Technology{"}, CriMiCo 2003 - Conference Proceedings",

publisher = "IEEE",

address = "United States",

note = "13th International Crimean Conference {"}Microwave and Telecommunication Technology{"}, CriMiCo 2003 ; Conference date: 08-09-2003 Through 12-09-2003",

}

Popok, VN, Prasalovich, SV & Campbell, EEB 2003, New direction in nanotechnology: Cluster ion beam technique. i 2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings. IEEE, s. 523-525, 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003, Sevastopol, Crimea, Ukraine, 08/09/2003. https://doi.org/10.1109/CRMICO.2003.158920

New direction in nanotechnology: Cluster ion beam technique. / Popok, V. N.; Prasalovich, S. V.; Campbell, E. E B.
2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings. IEEE, 2003. s. 523-525.

Publikation: Bidrag til bog/antologi/rapport/konference proceeding › Konferenceartikel i proceeding › Forskning

TY - GEN

T1 - New direction in nanotechnology: Cluster ion beam technique

AU - Popok, V. N.

AU - Prasalovich, S. V.

AU - Campbell, E. E B

PY - 2003/9/1

Y1 - 2003/9/1

N2 - A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.

AB - A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.

UR - http://www.scopus.com/inward/record.url?scp=84945132913&partnerID=8YFLogxK

U2 - 10.1109/CRMICO.2003.158920

DO - 10.1109/CRMICO.2003.158920

M3 - Article in proceeding

AN - SCOPUS:84945132913

SP - 523

EP - 525

BT - 2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings

PB - IEEE

T2 - 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003

Y2 - 8 September 2003 through 12 September 2003

ER -

New direction in nanotechnology: Cluster ion beam technique

Abstract

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