Plasma assisted growth of ultrathin nitrids on Si surfaces under ultrahigh vacuum conditions

Per Morgen, Ali Bahari, Kjeld Pedersen, Zheshen Li

Publikation: Bidrag til tidsskrift › Konferenceartikel i tidsskrift › Forskning › peer review

21 Citationer (Scopus)

Originalsprog	Engelsk
Bogserie	Journal of Physics - Conference Series
Udgave nummer	86
Antal sider	19
ISSN	1742-6588
DOI	https://doi.org/10.1088/1742-6596/86/1/012019
Status	Udgivet - 2007
Begivenhed	5th EU-Japan Joint Symposium on Plasma Processing - Belgrade, Serbien Varighed: 7 mar. 2007 → 9 mar. 2007 Konferencens nummer: 5

Konference	5th EU-Japan Joint Symposium on Plasma Processing
Nummer	5
Land/Område	Serbien
By	Belgrade
Periode	07/03/2007 → 09/03/2007

Adgang til dokumentet

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title = "Plasma assisted growth of ultrathin nitrids on Si surfaces under ultrahigh vacuum conditions",

author = "Per Morgen and Ali Bahari and Kjeld Pedersen and Zheshen Li",

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AU - Morgen, Per

AU - Bahari, Ali

AU - Pedersen, Kjeld

AU - Li, Zheshen

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PY - 2007

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JO - Journal of Physics - Conference Series

JF - Journal of Physics - Conference Series

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T2 - 5th EU-Japan Joint Symposium on Plasma Processing

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