Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors

Dennis Achton Nielsen, Vladimir Popok, Kjeld Pedersen

Publikation: Bidrag til bog/antologi/rapport/konference proceedingKonferenceartikel i proceedingForskningpeer review

Abstrakt

Kelvin probe force microscopy (KPFM) is widely used as characterization
tool on functional heterostructures and components but it often suffers from
measurement artifacts on such structures because the presence of the biased cantilever tip transforms the actual surface potential. In this work we have developed a physics-based finite element model of KPFM measurements on dielectrics in order to investigate the impact of tip-induced polarization. The model is compared with experiments on film capacitors, where it is found that tip-induced polarization is a significant contributor to the potential profiles obtained by KPFM.
OriginalsprogEngelsk
Titel3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM) : Proceedings, Oludeniz, Turkey, 19-23 October 2015
RedaktørerA.Y. Oral, Z.B. Bahsi Oral
Antal sider7
ForlagSpringer
Publikationsdato2017
Sider215-221
ISBN (Trykt)978-3-319-46600-2
ISBN (Elektronisk)978-3-319-46601-9
DOI
StatusUdgivet - 2017
Begivenhed3rd International Multidisciplinary Microscopy and Microanalysis Congress : Oludeniz - Oludeniz, Tyrkiet
Varighed: 19 okt. 201523 okt. 2015

Konference

Konference3rd International Multidisciplinary Microscopy and Microanalysis Congress
LandTyrkiet
ByOludeniz
Periode19/10/201523/10/2015
NavnSpringer Proceedings in Physics
Vol/bind186
ISSN0930-8989

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