Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors

Dennis Achton Nielsen; Vladimir Popok; Kjeld Pedersen

doi:10.1007/978-3-319-46601-9_25

Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors

Dennis Achton Nielsen, Vladimir Popok, Kjeld Pedersen

Publikation: Bidrag til bog/antologi/rapport/konference proceeding › Konferenceartikel i proceeding › Forskning › peer review

Abstract

Kelvin probe force microscopy (KPFM) is widely used as characterization
tool on functional heterostructures and components but it often suffers from
measurement artifacts on such structures because the presence of the biased cantilever tip transforms the actual surface potential. In this work we have developed a physics-based finite element model of KPFM measurements on dielectrics in order to investigate the impact of tip-induced polarization. The model is compared with experiments on film capacitors, where it is found that tip-induced polarization is a significant contributor to the potential profiles obtained by KPFM.

Originalsprog	Engelsk
Titel	3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM) : Proceedings, Oludeniz, Turkey, 19-23 October 2015
Redaktører	A.Y. Oral, Z.B. Bahsi Oral
Antal sider	7
Forlag	Springer
Publikationsdato	2017
Sider	215-221
ISBN (Trykt)	978-3-319-46600-2
ISBN (Elektronisk)	978-3-319-46601-9
DOI	https://doi.org/10.1007/978-3-319-46601-9_25
Status	Udgivet - 2017
Begivenhed	3rd International Multidisciplinary Microscopy and Microanalysis Congress : Oludeniz - Oludeniz, Tyrkiet Varighed: 19 okt. 2015 → 23 okt. 2015

Konference

Konference	3rd International Multidisciplinary Microscopy and Microanalysis Congress
Land/Område	Tyrkiet
By	Oludeniz
Periode	19/10/2015 → 23/10/2015

Navn	Springer Proceedings in Physics
Vol/bind	186
ISSN	0930-8989

Adgang til dokumentet

10.1007/978-3-319-46601-9_25

AUB Link

Søg efter materialet i Aalborg Universitetsbiblioteks søgemaskine

Center Of Reliable Power Electronics (CORPE)
Blaabjerg, F. (PI (principal investigator)), Munk-Nielsen, S. (Projektdeltager), Pedersen, K. (Projektdeltager) & Popok, V. (Projektdeltager)
01/04/2011 → 31/12/2016
Projekter: Projekt › Forskning

Citationsformater

Nielsen, D. A., Popok, V., & Pedersen, K. (2017). Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors. I A. Y. Oral, & Z. B. Bahsi Oral (red.), 3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM): Proceedings, Oludeniz, Turkey, 19-23 October 2015 (s. 215-221). Springer. https://doi.org/10.1007/978-3-319-46601-9_25

Nielsen, Dennis Achton ; Popok, Vladimir ; Pedersen, Kjeld. / Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors. 3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM): Proceedings, Oludeniz, Turkey, 19-23 October 2015. red. / A.Y. Oral ; Z.B. Bahsi Oral. Springer, 2017. s. 215-221 (Springer Proceedings in Physics, Bind 186).

@inproceedings{61936437ea3647deb9ddc6062eba2ae7,

title = "Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors",

abstract = "Kelvin probe force microscopy (KPFM) is widely used as characterizationtool on functional heterostructures and components but it often suffers frommeasurement artifacts on such structures because the presence of the biased cantilever tip transforms the actual surface potential. In this work we have developed a physics-based finite element model of KPFM measurements on dielectrics in order to investigate the impact of tip-induced polarization. The model is compared with experiments on film capacitors, where it is found that tip-induced polarization is a significant contributor to the potential profiles obtained by KPFM.",

author = "Nielsen, {Dennis Achton} and Vladimir Popok and Kjeld Pedersen",

year = "2017",

doi = "10.1007/978-3-319-46601-9_25",

language = "English",

isbn = "978-3-319-46600-2",

series = "Springer Proceedings in Physics",

publisher = "Springer",

pages = "215--221",

editor = "A.Y. Oral and {Bahsi Oral}, {Z.B. }",

booktitle = "3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM)",

address = "Germany",

note = "3rd International Multidisciplinary Microscopy and Microanalysis Congress : Oludeniz, InterM 2015 ; Conference date: 19-10-2015 Through 23-10-2015",

}

Nielsen, DA, Popok, V & Pedersen, K 2017, Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors. i AY Oral & ZB Bahsi Oral (red), 3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM): Proceedings, Oludeniz, Turkey, 19-23 October 2015. Springer, Springer Proceedings in Physics, bind 186, s. 215-221, 3rd International Multidisciplinary Microscopy and Microanalysis Congress , Oludeniz, Tyrkiet, 19/10/2015. https://doi.org/10.1007/978-3-319-46601-9_25

Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors. / Nielsen, Dennis Achton; Popok, Vladimir; Pedersen, Kjeld.
3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM): Proceedings, Oludeniz, Turkey, 19-23 October 2015. red. / A.Y. Oral; Z.B. Bahsi Oral. Springer, 2017. s. 215-221 (Springer Proceedings in Physics, Bind 186).

Publikation: Bidrag til bog/antologi/rapport/konference proceeding › Konferenceartikel i proceeding › Forskning › peer review

TY - GEN

T1 - Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors

AU - Nielsen, Dennis Achton

AU - Popok, Vladimir

AU - Pedersen, Kjeld

PY - 2017

Y1 - 2017

N2 - Kelvin probe force microscopy (KPFM) is widely used as characterizationtool on functional heterostructures and components but it often suffers frommeasurement artifacts on such structures because the presence of the biased cantilever tip transforms the actual surface potential. In this work we have developed a physics-based finite element model of KPFM measurements on dielectrics in order to investigate the impact of tip-induced polarization. The model is compared with experiments on film capacitors, where it is found that tip-induced polarization is a significant contributor to the potential profiles obtained by KPFM.

AB - Kelvin probe force microscopy (KPFM) is widely used as characterizationtool on functional heterostructures and components but it often suffers frommeasurement artifacts on such structures because the presence of the biased cantilever tip transforms the actual surface potential. In this work we have developed a physics-based finite element model of KPFM measurements on dielectrics in order to investigate the impact of tip-induced polarization. The model is compared with experiments on film capacitors, where it is found that tip-induced polarization is a significant contributor to the potential profiles obtained by KPFM.

U2 - 10.1007/978-3-319-46601-9_25

DO - 10.1007/978-3-319-46601-9_25

M3 - Article in proceeding

SN - 978-3-319-46600-2

T3 - Springer Proceedings in Physics

SP - 215

EP - 221

BT - 3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM)

A2 - Oral, A.Y.

A2 - Bahsi Oral, Z.B.

PB - Springer

T2 - 3rd International Multidisciplinary Microscopy and Microanalysis Congress

Y2 - 19 October 2015 through 23 October 2015

ER -

Nielsen DA, Popok V, Pedersen K. Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors. I Oral AY, Bahsi Oral ZB, red., 3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM): Proceedings, Oludeniz, Turkey, 19-23 October 2015. Springer. 2017. s. 215-221. (Springer Proceedings in Physics, Bind 186). doi: 10.1007/978-3-319-46601-9_25

Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors

Abstract

Konference

Adgang til dokumentet

AUB Link

Fingeraftryk

Projekter

Center Of Reliable Power Electronics (CORPE)

Citationsformater