Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaN

Ievgen Boturchuk, Thomas Walter, Brian Julsgaard, Golta Khatibi, Sabine Schwarz, Michael Stöger-Pollach, Kjeld Pedersen, Vladimir N. Popok*

*Kontaktforfatter

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

2 Citationer (Scopus)
27 Downloads (Pure)
OriginalsprogEngelsk
TidsskriftJournal of Materials Science: Materials in Electronics
Vol/bind30
Udgave nummer19
Sider (fra-til)18144-18152
Antal sider9
ISSN0957-4522
DOI
StatusUdgivet - 1 okt. 2019

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