Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaN

Ievgen Boturchuk, Thomas Walter, Brian Julsgaard, Golta Khatibi, Sabine Schwarz, Michael Stöger-Pollach, Kjeld Pedersen, Vladimir N. Popok*

*Kontaktforfatter

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

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Material Science

Engineering

Chemical Engineering