Synthesis of Cu Nanoparticles in Al2O3 by Ion Implantation and Subsequent Laser Annealing

Andrei Stepanov; Vladimir Popok

doi:10.1063/1.1619788

Synthesis of Cu Nanoparticles in Al2O3 by Ion Implantation and Subsequent Laser Annealing

Andrei Stepanov, Vladimir Popok

Publikation: Bidrag til bog/antologi/rapport/konference proceeding › Konferenceartikel i proceeding › Forskning › peer review

2 Citationer (Scopus)

Abstract

Al2O3 samples with Cu nanoparticles synthesised by ion implantation at 40 keV, with a dose of 1x1017 ion/cm2 and a current density from 2.5 to 12.5 μA/cm2 were annealed using several pulses from a KrF excimer laser with a single pulse fluence of 0.3 J/cm2. The copper depth distribution, formation and modification of metal nanoparticles under the ion implantation and laser treatment were studied by Rutherford backscattering (RBS), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM) and optical spectroscopy. The metal nucleation, the change in particle size and the possibility for oxidation of the copper particles are examined in the framework of Mie theory.

Originalsprog	Engelsk
Titel	AIP Conference Proceedings
Redaktører	J.L. Duggan, I. Lon Morgan, M. Hall
Antal sider	4
Vol/bind	680
Publikationsdato	aug. 2003
Sider	601-604
ISBN (Trykt)	0-7354-0149-7
DOI	https://doi.org/10.1063/1.1619788
Status	Udgivet - aug. 2003
Udgivet eksternt	Ja
Begivenhed	17th International Conference on the Application of Accelerators in Research and Industry - Denton, USA Varighed: 12 nov. 2002 → 16 nov. 2002

Konference

Konference	17th International Conference on the Application of Accelerators in Research and Industry
Land/Område	USA
By	Denton
Periode	12/11/2002 → 16/11/2002

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10.1063/1.1619788

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Citationsformater

@inproceedings{6eec91afd45d458985365ec731d3b3b1,

title = "Synthesis of Cu Nanoparticles in Al2O3 by Ion Implantation and Subsequent Laser Annealing",

abstract = "Al2O3 samples with Cu nanoparticles synthesised by ion implantation at 40 keV, with a dose of 1x1017 ion/cm2 and a current density from 2.5 to 12.5 μA/cm2 were annealed using several pulses from a KrF excimer laser with a single pulse fluence of 0.3 J/cm2. The copper depth distribution, formation and modification of metal nanoparticles under the ion implantation and laser treatment were studied by Rutherford backscattering (RBS), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM) and optical spectroscopy. The metal nucleation, the change in particle size and the possibility for oxidation of the copper particles are examined in the framework of Mie theory.",

author = "Andrei Stepanov and Vladimir Popok",

year = "2003",

month = aug,

doi = "10.1063/1.1619788",

language = "English",

isbn = "0-7354-0149-7",

volume = "680",

pages = "601--604",

editor = "J.L. Duggan and {Lon Morgan}, I. and M. Hall",

booktitle = "AIP Conference Proceedings",

note = "17th International Conference on the Application of Accelerators in Research and Industry ; Conference date: 12-11-2002 Through 16-11-2002",

}

TY - GEN

T1 - Synthesis of Cu Nanoparticles in Al2O3 by Ion Implantation and Subsequent Laser Annealing

AU - Stepanov, Andrei

AU - Popok, Vladimir

PY - 2003/8

Y1 - 2003/8

N2 - Al2O3 samples with Cu nanoparticles synthesised by ion implantation at 40 keV, with a dose of 1x1017 ion/cm2 and a current density from 2.5 to 12.5 μA/cm2 were annealed using several pulses from a KrF excimer laser with a single pulse fluence of 0.3 J/cm2. The copper depth distribution, formation and modification of metal nanoparticles under the ion implantation and laser treatment were studied by Rutherford backscattering (RBS), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM) and optical spectroscopy. The metal nucleation, the change in particle size and the possibility for oxidation of the copper particles are examined in the framework of Mie theory.

AB - Al2O3 samples with Cu nanoparticles synthesised by ion implantation at 40 keV, with a dose of 1x1017 ion/cm2 and a current density from 2.5 to 12.5 μA/cm2 were annealed using several pulses from a KrF excimer laser with a single pulse fluence of 0.3 J/cm2. The copper depth distribution, formation and modification of metal nanoparticles under the ion implantation and laser treatment were studied by Rutherford backscattering (RBS), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM) and optical spectroscopy. The metal nucleation, the change in particle size and the possibility for oxidation of the copper particles are examined in the framework of Mie theory.

U2 - 10.1063/1.1619788

DO - 10.1063/1.1619788

M3 - Article in proceeding

SN - 0-7354-0149-7

VL - 680

SP - 601

EP - 604

BT - AIP Conference Proceedings

A2 - Duggan, J.L.

A2 - Lon Morgan, I.

A2 - Hall, M.

T2 - 17th International Conference on the Application of Accelerators in Research and Industry

Y2 - 12 November 2002 through 16 November 2002

ER -

Synthesis of Cu Nanoparticles in Al2O3 by Ion Implantation and Subsequent Laser Annealing

Abstract

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