The Effect of High Implant Doses and High Ion Current Densities on Polyimide Film Properties

Vladimir Popok, I.I. Azarko, R.I. Khaibullin

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@article{c431bbac25b94a45995dc089f79e98dd,

title = "The Effect of High Implant Doses and High Ion Current Densities on Polyimide Film Properties",

author = "Vladimir Popok and I.I. Azarko and R.I. Khaibullin",

year = "2002",

month = apr,

language = "English",

volume = "47",

pages = "459--464",

journal = "Technical Physics",

issn = "1063-7842",

publisher = "M A I K Nauka - Interperiodica",

number = "4",

}