A 32-site neural recording probe fabricated by double-sided deep reactive ion etching of silicon-on-insulator substrates

Peter Norlin, Maria Kindlundh, Aliette Mouroux, Ken Yoshida, Winnie Jensen, Ulrich G. Hofmann

Research output: Contribution to book/anthology/report/conference proceedingArticle in proceedingResearch

Original languageEnglish
Title of host publication12th Micromechanics Europe Workshop, MME, 16-18 September 2001, Cork, Ireland
Number of pages4
Publication date2001
Publication statusPublished - 2001

Cite this