A 32-site neural recording probe fabricated by double-sided deep reactive ion etching of silicon-on-insulator substrates

Peter Norlin, Maria Kindlundh, Aliette Mouroux, Ken Yoshida, Winnie Jensen, Ulrich G. Hofmann

Research output: Contribution to book/anthology/report/conference proceeding › Article in proceeding › Research

Original language	English
Title of host publication	12th Micromechanics Europe Workshop, MME, 16-18 September 2001, Cork, Ireland
Number of pages	4
Publication date	2001
Publication status	Published - 2001

Access to Document

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title = "A 32-site neural recording probe fabricated by double-sided deep reactive ion etching of silicon-on-insulator substrates",

author = "Peter Norlin and Maria Kindlundh and Aliette Mouroux and Ken Yoshida and Winnie Jensen and Hofmann, {Ulrich G.}",

year = "2001",

language = "English",

booktitle = "12th Micromechanics Europe Workshop, MME, 16-18 September 2001, Cork, Ireland",

}

A 32-site neural recording probe fabricated by double-sided deep reactive ion etching of silicon-on-insulator substrates. / Norlin, Peter; Kindlundh, Maria; Mouroux, Aliette et al.
12th Micromechanics Europe Workshop, MME, 16-18 September 2001, Cork, Ireland. 2001.

Research output: Contribution to book/anthology/report/conference proceeding › Article in proceeding › Research

TY - GEN

T1 - A 32-site neural recording probe fabricated by double-sided deep reactive ion etching of silicon-on-insulator substrates

AU - Norlin, Peter

AU - Kindlundh, Maria

AU - Mouroux, Aliette

AU - Yoshida, Ken

AU - Jensen, Winnie

AU - Hofmann, Ulrich G.

PY - 2001

Y1 - 2001

M3 - Article in proceeding

BT - 12th Micromechanics Europe Workshop, MME, 16-18 September 2001, Cork, Ireland

ER -