A 32-site neural recording probe fabricated by DRIE of SOI substrates

P. Norlin, M. Kindlundh, A. Mouroux, Kenichi Yoshida, U.G. Hofmann

Research output: Contribution to journalJournal articleResearchpeer-review

148 Citations (Scopus)
Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number4
Pages (from-to)414-419
ISSN0960-1317
Publication statusPublished - 2002

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