A 32-site neural recording probe fabricated by DRIE of SOI substrates

P. Norlin, M. Kindlundh, A. Mouroux, Kenichi Yoshida, U.G. Hofmann

Research output: Contribution to journalJournal articleResearchpeer-review

143 Citations (Scopus)
Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number4
Pages (from-to)414-419
ISSN0960-1317
Publication statusPublished - 2002

Cite this

Norlin, P., Kindlundh, M., Mouroux, A., Yoshida, K., & Hofmann, U. G. (2002). A 32-site neural recording probe fabricated by DRIE of SOI substrates. Journal of Micromechanics and Microengineering, 12(4), 414-419.
Norlin, P. ; Kindlundh, M. ; Mouroux, A. ; Yoshida, Kenichi ; Hofmann, U.G. / A 32-site neural recording probe fabricated by DRIE of SOI substrates. In: Journal of Micromechanics and Microengineering. 2002 ; Vol. 12, No. 4. pp. 414-419.
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Norlin, P, Kindlundh, M, Mouroux, A, Yoshida, K & Hofmann, UG 2002, 'A 32-site neural recording probe fabricated by DRIE of SOI substrates', Journal of Micromechanics and Microengineering, vol. 12, no. 4, pp. 414-419.

A 32-site neural recording probe fabricated by DRIE of SOI substrates. / Norlin, P.; Kindlundh, M.; Mouroux, A.; Yoshida, Kenichi; Hofmann, U.G.

In: Journal of Micromechanics and Microengineering, Vol. 12, No. 4, 2002, p. 414-419.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - A 32-site neural recording probe fabricated by DRIE of SOI substrates

AU - Norlin, P.

AU - Kindlundh, M.

AU - Mouroux, A.

AU - Yoshida, Kenichi

AU - Hofmann, U.G.

PY - 2002

Y1 - 2002

M3 - Journal article

VL - 12

SP - 414

EP - 419

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 4

ER -

Norlin P, Kindlundh M, Mouroux A, Yoshida K, Hofmann UG. A 32-site neural recording probe fabricated by DRIE of SOI substrates. Journal of Micromechanics and Microengineering. 2002;12(4):414-419.