A 32-site neural recording probe fabricated by DRIE of SOI substrates

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	12
Issue number	4
Pages (from-to)	414-419
ISSN	0960-1317
Publication status	Published - 2002

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@article{2cb2db80002511dab4d5000ea68e967b,

title = "A 32-site neural recording probe fabricated by DRIE of SOI substrates",

author = "P. Norlin and M. Kindlundh and A. Mouroux and Kenichi Yoshida and U.G. Hofmann",

year = "2002",

language = "English",

volume = "12",

pages = "414--419",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

number = "4",

}

TY - JOUR

T1 - A 32-site neural recording probe fabricated by DRIE of SOI substrates

AU - Norlin, P.

AU - Kindlundh, M.

AU - Mouroux, A.

AU - Yoshida, Kenichi

AU - Hofmann, U.G.

PY - 2002

Y1 - 2002

M3 - Journal article

SN - 0960-1317

VL - 12

SP - 414

EP - 419

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 4

ER -