Original language | English |
---|---|
Journal | Semiconductor Science and Technology |
Volume | 11 |
Issue number | 5 |
Pages (from-to) | 722-725 |
Number of pages | 4 |
ISSN | 0268-1242 |
Publication status | Published - 1996 |
Externally published | Yes |
Annealing of Radiation Defects in Dual Implanted Silicon
I.P. Kozlov, Vladimir Odzhaev, Vladimir Popok, Vladimir Hnatowicz
Research output: Contribution to journal › Journal article › Research › peer-review
4
Citations
(Scopus)