Annealing of Radiation Defects in Dual Implanted Silicon

I.P. Kozlov, Vladimir Odzhaev, Vladimir Popok, Vladimir Hnatowicz

Research output: Contribution to journalJournal articleResearchpeer-review

4 Citations (Scopus)
Original languageEnglish
JournalSemiconductor Science and Technology
Volume11
Issue number5
Pages (from-to)722-725
Number of pages4
ISSN0268-1242
Publication statusPublished - 1996
Externally publishedYes

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