Annealing of Radiation Defects in Dual Implanted Silicon

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Semiconductor Science and Technology
Volume	11
Issue number	5
Pages (from-to)	722-725
Number of pages	4
ISSN	0268-1242
Publication status	Published - 1996
Externally published	Yes

AUB Link

@article{45d68cab9e3c4f58b4306636203861c7,

title = "Annealing of Radiation Defects in Dual Implanted Silicon",

author = "I.P. Kozlov and Vladimir Odzhaev and Vladimir Popok and Vladimir Hnatowicz",

year = "1996",

language = "English",

volume = "11",

pages = "722--725",

journal = "Semiconductor Science and Technology",

issn = "0268-1242",

publisher = "IOP Publishing Ltd.",

number = "5",

}