Argon cluster impacts on layered silicon, silica and graphite surfaces

Juha Samela, Kai Nordlund, J. Keinonen, Vladimir Popok, Eleanor E.B. Campbell

Research output: Contribution to journalJournal articleResearchpeer-review

20 Citations (Scopus)

Abstract

Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.
Original languageEnglish
JournalThe European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics
Volume43
Issue number1-3
Pages (from-to)181-184
Number of pages4
ISSN1434-6060
DOIs
Publication statusPublished - May 2007
Externally publishedYes

Fingerprint

bombardment
graphite
argon
silicon dioxide
silicon
cratering
molecular dynamics
simulation
energy

Keywords

  • Theory of impact phenomena
  • numerical simulation
  • cluster

Cite this

Samela, Juha ; Nordlund, Kai ; Keinonen, J. ; Popok, Vladimir ; Campbell, Eleanor E.B. / Argon cluster impacts on layered silicon, silica and graphite surfaces. In: The European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics. 2007 ; Vol. 43, No. 1-3. pp. 181-184.
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Argon cluster impacts on layered silicon, silica and graphite surfaces. / Samela, Juha; Nordlund, Kai; Keinonen, J.; Popok, Vladimir; Campbell, Eleanor E.B.

In: The European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics, Vol. 43, No. 1-3, 05.2007, p. 181-184.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Argon cluster impacts on layered silicon, silica and graphite surfaces

AU - Samela, Juha

AU - Nordlund, Kai

AU - Keinonen, J.

AU - Popok, Vladimir

AU - Campbell, Eleanor E.B.

PY - 2007/5

Y1 - 2007/5

N2 - Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

AB - Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

KW - Theory of impact phenomena

KW - numerical simulation

KW - cluster

U2 - 10.1140/epjd/e2007-00104-y

DO - 10.1140/epjd/e2007-00104-y

M3 - Journal article

VL - 43

SP - 181

EP - 184

JO - The European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics

JF - The European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics

SN - 1434-6060

IS - 1-3

ER -