Argon cluster impacts on layered silicon, silica and graphite surfaces

Juha Samela; Kai Nordlund; J. Keinonen; Vladimir Popok; Eleanor E.B. Campbell

doi:10.1140/epjd/e2007-00104-y

Argon cluster impacts on layered silicon, silica and graphite surfaces

Juha Samela, Kai Nordlund, J. Keinonen, Vladimir Popok, Eleanor E.B. Campbell

Research output: Contribution to journal › Journal article › Research › peer-review

24 Citations (Scopus)

Abstract

Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

Original language	English
Journal	The European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics
Volume	43
Issue number	1-3
Pages (from-to)	181-184
Number of pages	4
ISSN	1434-6060
DOIs	https://doi.org/10.1140/epjd/e2007-00104-y
Publication status	Published - May 2007
Externally published	Yes

Keywords

Theory of impact phenomena
numerical simulation
cluster

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title = "Argon cluster impacts on layered silicon, silica and graphite surfaces",

abstract = "Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.",

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author = "Juha Samela and Kai Nordlund and J. Keinonen and Vladimir Popok and Campbell, {Eleanor E.B.}",

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language = "English",

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T1 - Argon cluster impacts on layered silicon, silica and graphite surfaces

AU - Samela, Juha

AU - Nordlund, Kai

AU - Keinonen, J.

AU - Popok, Vladimir

AU - Campbell, Eleanor E.B.

PY - 2007/5

Y1 - 2007/5

N2 - Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

AB - Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

KW - Theory of impact phenomena

KW - numerical simulation

KW - cluster

U2 - 10.1140/epjd/e2007-00104-y

DO - 10.1140/epjd/e2007-00104-y

M3 - Journal article

SN - 1434-6060

VL - 43

SP - 181

EP - 184

JO - The European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics

JF - The European Physical Journal D: Atomic, Molecular, Optical and Plasma Physics

IS - 1-3

ER -

Argon cluster impacts on layered silicon, silica and graphite surfaces

Abstract

Keywords

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