Boron Electrical Activation in Dual B + N and B + Ar Implanted Silicon

Vladimir Odzhaev, Vladimir Popok, V.S. Prosolovich, Vladimir Hnatowicz

Research output: Contribution to journalJournal articleResearchpeer-review

1 Citation (Scopus)
Original languageEnglish
JournalApplied Physics A: Materials Science & Processing
Volume62
Pages (from-to)355-358
Number of pages4
ISSN0947-8396
Publication statusPublished - 1996
Externally publishedYes

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