@inproceedings{ab0fbbb16776481aba467238b3861f4d,
title = "Cluster Implantation and Deposition Apparatus: Design and Capabilities",
abstract = "In the current report, a design and capabilities of a cluster implantation and deposition apparatus (CIDA) involving two different cluster sources are described. The clusters produced from gas precursors (Ar, N etc.) by PuCluS-2 can be used to study cluster ion implantation in order to develop contributions to the theory of cluster stopping in matter as well as for practical applications requiring ultra-shallow implantation and modification of surfaces on the nanoscale. Metal clusters from the magnetron cluster source are of interest for the production of optical sensors to detect specific biological objects (for instance, enzymes and proteins) as well as for the enhancement of photocatalytic reactions, for example, in hydrogen production.",
keywords = "cluster beams, cluster implantation and deposition",
author = "Muhammad Hanif and Vladimir Popok",
year = "2015",
doi = "10.1007/978-94-017-9133-5_46",
language = "English",
isbn = "978-94-017-9142-7",
series = "NATO Science for Peace and Security Series B: Physics and Biophysics",
pages = "505--507",
editor = "{Di Bartolo}, Baldassare and John Collins and Luciano Silvestri",
booktitle = "Nano-Structures for Optics and Photonics",
publisher = "Springer Science+Business Media",
address = "United States",
note = "Proc. Summer School on Nano-Structures for Optics and Photonics ; Conference date: 04-07-2013 Through 19-07-2013",
}