@inproceedings{a4d63739239e41da8905e5707ce4f0d6,
title = "Comparison of Selective Deposition Techniques for Fabricating p+n Ultrashallow Silicon Diodes",
author = "Xingyu Liu and Thammaiah, {Shivakumar D.} and Scholtes, {Thomas L.M} and Nanver, {Lis K}",
year = "2016",
month = mar,
day = "21",
language = "English",
booktitle = "Proceedings of ICT.OPEN-2016, Semiconductor Advances for Future Electronics and Sensors (SAFE)",
note = "ICT Open Event ; Conference date: 22-03-2016 Through 23-03-2016",
}