Defects formation in the dual B+ and N+ ions implanted silicon

V. Popok*, V. Odzhaev, V. Hnatowicz, J. Kvítek, V. Švorčik, V. Rybka

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

1 Citation (Scopus)
Original languageEnglish
JournalCzechoslovak Journal of Physics
Volume44
Issue number10
Pages (from-to)949-956
Number of pages8
ISSN0011-4626
DOIs
Publication statusPublished - 1 Oct 1994
Externally publishedYes

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