Defects formation in the dual B+ and N+ ions implanted silicon

V. Popok*, V. Odzhaev, V. Hnatowicz, J. Kvítek, V. Švorčik, V. Rybka

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Defects formation in the dual B+ and N+ ions implanted silicon'. Together they form a unique fingerprint.

Engineering

Material Science