Design and capabilities of an experimental setup based on magnetron sputtering for formation and deposition of size-selected metal clusters on ultra-clean surfaces

Hannes Hartmann, Vladimir Popok, Ingo Barke, Viola von Oeynhausen, Karl-Heinz Meiwes-Broer

    Research output: Contribution to journalJournal articleResearchpeer-review

    23 Citations (Scopus)
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    Abstract

    The design and performance of an experimental setup utilizing a magnetron sputtering source for production of beams of ionized size-selected clusters for deposition in ultra-high vacuum is described. For the case of copper cluster formation the influence of different source parameters is studied and analyzed. Size-selected clusters are deposited on substrates and the efficiency of an electrostatic quadrupole mass selector (QMS) is tested. Height analysis using atomic force microscopy (AFM) demonstrates relative standard size deviations of 7-10 % for the particles of various sizes between 6 nm and 19 nm. Combined analysis by AFM and transmission electron microscopy (TEM) reveals that the clusters preserve almost spherical shape after the deposition on amorphous carbon substrates. Supported nanoparticles of a few nanometres in diameter have crystalline structure with a face-centered cubic (fcc) lattice.
    Original languageEnglish
    JournalReview of Scientific Instruments
    Volume83
    Issue number7
    Pages (from-to)073304
    Number of pages6
    ISSN0034-6748
    DOIs
    Publication statusPublished - Jul 2012

    Fingerprint

    metal clusters
    Magnetron sputtering
    Atomic force microscopy
    magnetron sputtering
    Amorphous carbon
    Ultrahigh vacuum
    Substrates
    Metals
    Electrostatics
    atomic force microscopy
    Nanoparticles
    Crystalline materials
    Transmission electron microscopy
    Copper
    face centered cubic lattices
    selectors
    ultrahigh vacuum
    quadrupoles
    electrostatics
    deviation

    Keywords

    • magnetron sputtering, cluster source, metal clusters, cluster deposition

    Cite this

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    title = "Design and capabilities of an experimental setup based on magnetron sputtering for formation and deposition of size-selected metal clusters on ultra-clean surfaces",
    abstract = "The design and performance of an experimental setup utilizing a magnetron sputtering source for production of beams of ionized size-selected clusters for deposition in ultra-high vacuum is described. For the case of copper cluster formation the influence of different source parameters is studied and analyzed. Size-selected clusters are deposited on substrates and the efficiency of an electrostatic quadrupole mass selector (QMS) is tested. Height analysis using atomic force microscopy (AFM) demonstrates relative standard size deviations of 7-10 {\%} for the particles of various sizes between 6 nm and 19 nm. Combined analysis by AFM and transmission electron microscopy (TEM) reveals that the clusters preserve almost spherical shape after the deposition on amorphous carbon substrates. Supported nanoparticles of a few nanometres in diameter have crystalline structure with a face-centered cubic (fcc) lattice.",
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    Design and capabilities of an experimental setup based on magnetron sputtering for formation and deposition of size-selected metal clusters on ultra-clean surfaces. / Hartmann, Hannes; Popok, Vladimir; Barke, Ingo; von Oeynhausen, Viola; Meiwes-Broer, Karl-Heinz.

    In: Review of Scientific Instruments, Vol. 83, No. 7, 07.2012, p. 073304.

    Research output: Contribution to journalJournal articleResearchpeer-review

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    AU - Hartmann, Hannes

    AU - Popok, Vladimir

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    AU - von Oeynhausen, Viola

    AU - Meiwes-Broer, Karl-Heinz

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