Differential Amplitude Scanning Optical Microscope Computer Aided for Linewidth Measurements

E.A. Bozhevolnaya, Sergei I. Bozhevolnyi, A.V. Postnikov

    Research output: Contribution to journalJournal articleResearchpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    JournalApplied Optics
    Volume31
    Issue number32
    Pages (from-to)6836-6839
    ISSN0003-6935
    Publication statusPublished - 1992

    Keywords

    • Scanning optical microscopy
    • Differential contrast imaging
    • Optical metrology

    Cite this

    Bozhevolnaya, E. A., Bozhevolnyi, S. I., & Postnikov, A. V. (1992). Differential Amplitude Scanning Optical Microscope Computer Aided for Linewidth Measurements. Applied Optics, 31(32), 6836-6839.