Effect of the Target Surface Temperature on the Distribution of Nanoparticles Formed by Implantation

Andrei Stepanov, D.E. Hole, Vladimir Popok

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Abstract

Metal-nanoparticle-containing composite layers were synthesized by implantation of 60 keV Ag+ ions into a soda-lime silicate glass to a dose of 3×1016 ion/cm2 at an ion beam current density of 3 μA/cm2 and a substrate temperature of 35°C. The results of implantation depend on the temperature effects developed in the glass targets of various thicknesses. Data on the silver distribution profile and the nucleation and growth of metal nanoparticles in depth of the implanted layers were obtained from the optical reflection spectra. It is demonstrated that even small variations in the surface temperature of the ion-bombarded glass substrate lead to significant changes in the conditions of nanoparticle formation in the sample.
Original languageEnglish
JournalTechnical Physics Letters
Volume27
Issue number7
Pages (from-to)554-556
Number of pages3
ISSN1063-7850
Publication statusPublished - Jul 2001
Externally publishedYes

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