Effects on energetic impact of atomic clusters with surfaces

Vladimir Popok; Sasa Vuckovic; Ahmed Abdela; Eleanor E.B. Campbell

Effects on energetic impact of atomic clusters with surfaces

Vladimir Popok
, Sasa Vuckovic
, Ahmed Abdela
, Eleanor E.B. Campbell

Research output: Contribution to book/anthology/report/conference proceeding › Article in proceeding › Research

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Abstract

A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Cluster beams are efficient tools for manipulating agglomerates of atoms providing control over the synthesis as well as modification of surfaces on the nm-scale. The application of cluster beams for technological purposes requires knowledge of the physics of cluster-surface impact. This has some significant differences compared to monomer ion – surface interactions. The main effects of cluster-surface collisions are discussed. Recent results obtained in experiments on silicon surface nanostructuring using keV-energy implantation of inert gas cluster ions are presented and compared with molecular dynamics (MD) simulations.

Original language	English
Title of host publication	Proceedings of 7-th International Conference Interaction of Radiation with Solids, September 26-28, 2007, Minsk
Editors	V.M. Anischik, S.I. Zhukova, I.I. Azarko, O.L. Dorozhkina
Number of pages	3
Place of Publication	Minsk
Publication date	Sept 2007
Pages	18-20
ISBN (Print)	978-985-476-530-3
Publication status	Published - Sept 2007
Externally published	Yes

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@inproceedings{81e3bf7456c54cc193ae913b367ffa1f,

title = "Effects on energetic impact of atomic clusters with surfaces",

abstract = "A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Cluster beams are efficient tools for manipulating agglomerates of atoms providing control over the synthesis as well as modification of surfaces on the nm-scale. The application of cluster beams for technological purposes requires knowledge of the physics of cluster-surface impact. This has some significant differences compared to monomer ion {\textendash} surface interactions. The main effects of cluster-surface collisions are discussed. Recent results obtained in experiments on silicon surface nanostructuring using keV-energy implantation of inert gas cluster ions are presented and compared with molecular dynamics (MD) simulations.",

author = "Vladimir Popok and Sasa Vuckovic and Ahmed Abdela and Campbell, \{Eleanor E.B.\}",

year = "2007",

month = sep,

language = "English",

isbn = "978-985-476-530-3",

pages = "18--20",

editor = "V.M. Anischik and S.I. Zhukova and I.I. Azarko and O.L. Dorozhkina",

booktitle = "Proceedings of 7-th International Conference Interaction of Radiation with Solids, September 26-28, 2007, Minsk",

}

Effects on energetic impact of atomic clusters with surfaces. / Popok, Vladimir; Vuckovic, Sasa; Abdela, Ahmed et al.
Proceedings of 7-th International Conference Interaction of Radiation with Solids, September 26-28, 2007, Minsk. ed. / V.M. Anischik; S.I. Zhukova; I.I. Azarko; O.L. Dorozhkina. Minsk, 2007. p. 18-20.

Research output: Contribution to book/anthology/report/conference proceeding › Article in proceeding › Research

TY - GEN

T1 - Effects on energetic impact of atomic clusters with surfaces

AU - Popok, Vladimir

AU - Vuckovic, Sasa

AU - Abdela, Ahmed

AU - Campbell, Eleanor E.B.

PY - 2007/9

Y1 - 2007/9

N2 - A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Cluster beams are efficient tools for manipulating agglomerates of atoms providing control over the synthesis as well as modification of surfaces on the nm-scale. The application of cluster beams for technological purposes requires knowledge of the physics of cluster-surface impact. This has some significant differences compared to monomer ion – surface interactions. The main effects of cluster-surface collisions are discussed. Recent results obtained in experiments on silicon surface nanostructuring using keV-energy implantation of inert gas cluster ions are presented and compared with molecular dynamics (MD) simulations.

AB - A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Cluster beams are efficient tools for manipulating agglomerates of atoms providing control over the synthesis as well as modification of surfaces on the nm-scale. The application of cluster beams for technological purposes requires knowledge of the physics of cluster-surface impact. This has some significant differences compared to monomer ion – surface interactions. The main effects of cluster-surface collisions are discussed. Recent results obtained in experiments on silicon surface nanostructuring using keV-energy implantation of inert gas cluster ions are presented and compared with molecular dynamics (MD) simulations.

M3 - Article in proceeding

SN - 978-985-476-530-3

SP - 18

EP - 20

BT - Proceedings of 7-th International Conference Interaction of Radiation with Solids, September 26-28, 2007, Minsk

A2 - Anischik, V.M.

A2 - Zhukova, S.I.

A2 - Azarko, I.I.

A2 - Dorozhkina, O.L.

CY - Minsk

ER -

Effects on energetic impact of atomic clusters with surfaces

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