Equivalent Circuit Modeling of a Rotary Piezoelectric Motor

In this paper, an enhanced equivalent circuit model of a rotary traveling wave piezoelectric ultrasonic motor "shinsei type USR60" is derived. The modeling is performed on the basis of an empirical approach combined with the electrical network method and some simplification assumptions about the physical behavior of the real system. This paper highlights the importance of the electromechanical coupling factor, which is responsible for the electrical to mechanical energy conversion. The emphasis is put on the difference between the effective coupling factor and the modal coupling factor. The effect of the temperature on the mechanical resonance frequency is considered and thereby integrated in the final model for long term operations.