From Oxygen Adsorption to the Growth of Thin Oxides on Silicon Surfaces

P. Morgen, T. Jensen, S. V. Gundelach, S. V. Hoffmann, Kjeld Pedersen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Computational Materials Science
Volume	21
Pages (from-to)	481-487
ISSN	0927-0256
Publication status	Published - 2001

Keywords

@article{d824c2f0809211db8b97000ea68e967b,

title = "From Oxygen Adsorption to the Growth of Thin Oxides on Silicon Surfaces",

keywords = "Oxide formation, Oxide formation",

author = "P. Morgen and T. Jensen and Gundelach, {S. V.} and Hoffmann, {S. V.} and Kjeld Pedersen",

year = "2001",

language = "English",

volume = "21",

pages = "481--487",

journal = "Computational Materials Science",

issn = "0927-0256",

publisher = "Elsevier",

}

TY - JOUR

T1 - From Oxygen Adsorption to the Growth of Thin Oxides on Silicon Surfaces

AU - Morgen, P.

AU - Jensen, T.

AU - Gundelach, S. V.

AU - Hoffmann, S. V.

AU - Pedersen, Kjeld

PY - 2001

Y1 - 2001

KW - Oxide formation

M3 - Journal article

SN - 0927-0256

VL - 21

SP - 481

EP - 487

JO - Computational Materials Science

JF - Computational Materials Science

ER -