Implantation of keV-energy argon clusters and radiation damage in diamond

Vladimir Popok, Juha Samela, Kai Nordlund, Vladimir Popov

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    Abstract

    We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, a good agreement for the value of displacement energy for the case of cluster impact is found by comparing the calculated target sputtering and experimentally measured depth of radiation damage.
    Original languageEnglish
    JournalPhysical Review B (Condensed Matter and Materials Physics)
    Volume85
    Issue number3
    Pages (from-to)033405
    Number of pages4
    ISSN1098-0121
    DOIs
    Publication statusPublished - 15 Jan 2012

    Keywords

    • cluster implantation, radiation damage, diamond, graphite

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