Abstract
The effects of ion implantation on the electrical properties were studied on several types of polymer films implanted with B+ and N+ ions. The EPR measurements indicate creation of paramagnetic centers in the ion implanted polymers. The resistivity of polymer films decreases down to 1 Ω cm with the increasing of the ion implantation dose. The capacitance and the Q-factor depend on the polymer type, current frequency, and external bias voltage.
Original language | English |
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Journal | Solid State Communications |
Volume | 95 |
Issue number | 1 |
Pages (from-to) | 49-51 |
Number of pages | 3 |
ISSN | 0038-1098 |
DOIs | |
Publication status | Published - 1 Jan 1995 |
Externally published | Yes |
Keywords
- A. polymers
- E. electron paramagnetic resonance