Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

Tayyab Shahid; Umer Izhar; Abid Ali; Talha Shahid; Taha Janjua

doi:10.1109/ICRAI.2016.7791242

Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

Tayyab Shahid, Umer Izhar, Abid Ali, Talha Shahid, Taha Janjua

Research output: Contribution to book/anthology/report/conference proceeding › Article in proceeding › Research › peer-review

Abstract

This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.

Original language	English
Title of host publication	2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016
Number of pages	5
Publisher	Electrical Engineering/Electronics, Computer, Communications and Information Technology Association
Publication date	19 Dec 2016
Pages	136-140
Article number	7791242
ISBN (Electronic)	9781509040599
DOIs	https://doi.org/10.1109/ICRAI.2016.7791242
Publication status	Published - 19 Dec 2016
Externally published	Yes
Event	2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016 - Islamabad, Pakistan Duration: 1 Nov 2016 → 2 Nov 2016

Conference

Conference	2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016
Country/Territory	Pakistan
City	Islamabad
Period	01/11/2016 → 02/11/2016
Sponsor	Higher Education Commission Pakistan (HEC), Ministry of Sciences and Technology (MoST), National University of Sciences and Technology (NUST)

Keywords

Finite Element Analysis
MEMS
Optimal Sensor
Stress Concentration region

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Shahid, T., Izhar, U., Ali, A., Shahid, T., & Janjua, T. (2016). Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor. In 2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016 (pp. 136-140). Article 7791242 Electrical Engineering/Electronics, Computer, Communications and Information Technology Association. https://doi.org/10.1109/ICRAI.2016.7791242

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abstract = "This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.",

keywords = "Finite Element Analysis, MEMS, Optimal Sensor, Stress Concentration region",

author = "Tayyab Shahid and Umer Izhar and Abid Ali and Talha Shahid and Taha Janjua",

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doi = "10.1109/ICRAI.2016.7791242",

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booktitle = "2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016",

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Shahid, T, Izhar, U, Ali, A, Shahid, T & Janjua, T 2016, Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor. in 2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016., 7791242, Electrical Engineering/Electronics, Computer, Communications and Information Technology Association, pp. 136-140, 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016, Islamabad, Pakistan, 01/11/2016. https://doi.org/10.1109/ICRAI.2016.7791242

Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor. / Shahid, Tayyab; Izhar, Umer; Ali, Abid et al.
2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016. Electrical Engineering/Electronics, Computer, Communications and Information Technology Association, 2016. p. 136-140 7791242.

Research output: Contribution to book/anthology/report/conference proceeding › Article in proceeding › Research › peer-review

TY - GEN

T1 - Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

AU - Shahid, Tayyab

AU - Izhar, Umer

AU - Ali, Abid

AU - Shahid, Talha

AU - Janjua, Taha

PY - 2016/12/19

Y1 - 2016/12/19

N2 - This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.

AB - This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.

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KW - MEMS

KW - Optimal Sensor

KW - Stress Concentration region

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U2 - 10.1109/ICRAI.2016.7791242

DO - 10.1109/ICRAI.2016.7791242

M3 - Article in proceeding

AN - SCOPUS:85011095635

SP - 136

EP - 140

BT - 2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016

PB - Electrical Engineering/Electronics, Computer, Communications and Information Technology Association

T2 - 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016

Y2 - 1 November 2016 through 2 November 2016

ER -

Shahid T, Izhar U, Ali A, Shahid T, Janjua T. Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor. In 2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016. Electrical Engineering/Electronics, Computer, Communications and Information Technology Association. 2016. p. 136-140. 7791242 doi: 10.1109/ICRAI.2016.7791242

Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

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