Photoelectron spectroscopy as an in situ contact-less method for studies of MOS properties of ultrathin oxides on Si

Ana G. Silva, Kjeld Pedersen, Zheshen S. Li, Per Morgen

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@article{ebead86b780c434cb7c8410042456583,

title = "Photoelectron spectroscopy as an in situ contact-less method for studies of MOS properties of ultrathin oxides on Si",

author = "Silva, {Ana G.} and Kjeld Pedersen and Li, {Zheshen S.} and Per Morgen",

year = "2015",

month = jul,

day = "4",

doi = "10.1016/j.apsusc.2015.07.024",

language = "English",

volume = "353",

pages = "1208--1213",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

}

TY - JOUR

T1 - Photoelectron spectroscopy as an in situ contact-less method for studies of MOS properties of ultrathin oxides on Si

AU - Silva, Ana G.

AU - Pedersen, Kjeld

AU - Li, Zheshen S.

AU - Morgen, Per

PY - 2015/7/4

Y1 - 2015/7/4

U2 - 10.1016/j.apsusc.2015.07.024

DO - 10.1016/j.apsusc.2015.07.024

M3 - Journal article

SN - 0169-4332

VL - 353

SP - 1208

EP - 1213

JO - Applied Surface Science

JF - Applied Surface Science

ER -