Plasma assisted growth of ultrathin nitrids on Si surfaces under ultrahigh vacuum conditions

Per Morgen, Ali Bahari, Kjeld Pedersen, Zheshen Li

Research output: Contribution to journal › Conference article in Journal › Research › peer-review

21 Citations (Scopus)

Original language	English
Book series	Journal of Physics - Conference Series
Issue number	86
Number of pages	19
ISSN	1742-6588
DOIs	https://doi.org/10.1088/1742-6596/86/1/012019
Publication status	Published - 2007
Event	5th EU-Japan Joint Symposium on Plasma Processing - Belgrade, Serbia Duration: 7 Mar 2007 → 9 Mar 2007 Conference number: 5

Conference	5th EU-Japan Joint Symposium on Plasma Processing
Number	5
Country/Territory	Serbia
City	Belgrade
Period	07/03/2007 → 09/03/2007

Access to Document

@inproceedings{5b96cea0e79b11ddb0a4000ea68e967b,

title = "Plasma assisted growth of ultrathin nitrids on Si surfaces under ultrahigh vacuum conditions",

author = "Per Morgen and Ali Bahari and Kjeld Pedersen and Zheshen Li",

year = "2007",

doi = "10.1088/1742-6596/86/1/012019",

language = "English",

journal = "Journal of Physics - Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing",

number = "86",

note = "5th EU-Japan Joint Symposium on Plasma Processing ; Conference date: 07-03-2007 Through 09-03-2007",

}

TY - GEN

T1 - Plasma assisted growth of ultrathin nitrids on Si surfaces under ultrahigh vacuum conditions

AU - Morgen, Per

AU - Bahari, Ali

AU - Pedersen, Kjeld

AU - Li, Zheshen

N1 - Conference code: 5

PY - 2007

Y1 - 2007

U2 - 10.1088/1742-6596/86/1/012019

DO - 10.1088/1742-6596/86/1/012019

M3 - Conference article in Journal

SN - 1742-6588

JO - Journal of Physics - Conference Series

JF - Journal of Physics - Conference Series

IS - 86

T2 - 5th EU-Japan Joint Symposium on Plasma Processing

Y2 - 7 March 2007 through 9 March 2007

ER -