Simulation and Verification of Tip-Induced Polarization During Kelvin Probe Force Microscopy Measurements on Film Capacitors

Dennis Achton Nielsen, Vladimir Popok, Kjeld Pedersen

Research output: Contribution to book/anthology/report/conference proceedingArticle in proceedingResearchpeer-review

Abstract

Kelvin probe force microscopy (KPFM) is widely used as characterization
tool on functional heterostructures and components but it often suffers from
measurement artifacts on such structures because the presence of the biased cantilever tip transforms the actual surface potential. In this work we have developed a physics-based finite element model of KPFM measurements on dielectrics in order to investigate the impact of tip-induced polarization. The model is compared with experiments on film capacitors, where it is found that tip-induced polarization is a significant contributor to the potential profiles obtained by KPFM.
Original languageEnglish
Title of host publication3rd International Multidisciplinary Microscopy and Microanalysis Congress (InterM) : Proceedings, Oludeniz, Turkey, 19-23 October 2015
EditorsA.Y. Oral, Z.B. Bahsi Oral
Number of pages7
PublisherSpringer
Publication date2017
Pages215-221
ISBN (Print)978-3-319-46600-2
ISBN (Electronic)978-3-319-46601-9
DOIs
Publication statusPublished - 2017
Event3rd International Multidisciplinary Microscopy and Microanalysis Congress : Oludeniz - Oludeniz, Turkey
Duration: 19 Oct 201523 Oct 2015

Conference

Conference3rd International Multidisciplinary Microscopy and Microanalysis Congress
CountryTurkey
CityOludeniz
Period19/10/201523/10/2015
SeriesSpringer Proceedings in Physics
Volume186
ISSN0930-8989

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