Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaN

Ievgen Boturchuk, Thomas Walter, Brian Julsgaard, Golta Khatibi, Sabine Schwarz, Michael Stöger-Pollach, Kjeld Pedersen, Vladimir N. Popok*

*Corresponding author

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalJournal of Materials Science: Materials in Electronics
Volume30
Issue number19
Pages (from-to)18144-18152
Number of pages9
ISSN0957-4522
DOIs
Publication statusPublished - 1 Oct 2019

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Ohmic contacts
electric contacts
Multilayers
Metals
Adhesion
metals
adhesion
Tantalum
Titanium nitride
Bending tests
Contact resistance
Buffer layers
Metallizing
Nitrides
tantalum nitrides
Evaporation
Electric properties
Energy gap
titanium nitrides
Annealing

Cite this

Boturchuk, Ievgen ; Walter, Thomas ; Julsgaard, Brian ; Khatibi, Golta ; Schwarz, Sabine ; Stöger-Pollach, Michael ; Pedersen, Kjeld ; Popok, Vladimir N. / Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaN. In: Journal of Materials Science: Materials in Electronics. 2019 ; Vol. 30, No. 19. pp. 18144-18152.
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Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaN. / Boturchuk, Ievgen; Walter, Thomas; Julsgaard, Brian; Khatibi, Golta; Schwarz, Sabine; Stöger-Pollach, Michael; Pedersen, Kjeld; Popok, Vladimir N.

In: Journal of Materials Science: Materials in Electronics, Vol. 30, No. 19, 01.10.2019, p. 18144-18152.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaN

AU - Boturchuk, Ievgen

AU - Walter, Thomas

AU - Julsgaard, Brian

AU - Khatibi, Golta

AU - Schwarz, Sabine

AU - Stöger-Pollach, Michael

AU - Pedersen, Kjeld

AU - Popok, Vladimir N.

PY - 2019/10/1

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M3 - Journal article

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SP - 18144

EP - 18152

JO - Journal of Materials Science: Materials in Electronics

JF - Journal of Materials Science: Materials in Electronics

SN - 0957-4522

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