Synthesis of Cu Nanoparticles in Al2O3 by Ion Implantation and Subsequent Laser Annealing

Andrei Stepanov, Vladimir Popok

Research output: Contribution to book/anthology/report/conference proceedingArticle in proceedingResearchpeer-review

2 Citations (Scopus)

Abstract

Al2O3 samples with Cu nanoparticles synthesised by ion implantation at 40 keV, with a dose of 1x1017 ion/cm2 and a current density from 2.5 to 12.5 μA/cm2 were annealed using several pulses from a KrF excimer laser with a single pulse fluence of 0.3 J/cm2. The copper depth distribution, formation and modification of metal nanoparticles under the ion implantation and laser treatment were studied by Rutherford backscattering (RBS), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM) and optical spectroscopy. The metal nucleation, the change in particle size and the possibility for oxidation of the copper particles are examined in the framework of Mie theory.
Original languageEnglish
Title of host publicationAIP Conference Proceedings
EditorsJ.L. Duggan, I. Lon Morgan, M. Hall
Number of pages4
Volume680
Publication dateAug 2003
Pages601-604
ISBN (Print)0-7354-0149-7
DOIs
Publication statusPublished - Aug 2003
Externally publishedYes
Event17th International Conference on the Application of Accelerators in Research and Industry - Denton, United States
Duration: 12 Nov 200216 Nov 2002

Conference

Conference17th International Conference on the Application of Accelerators in Research and Industry
CountryUnited States
CityDenton
Period12/11/200216/11/2002

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