Abstract
Al2O3 samples with Cu nanoparticles synthesised by ion implantation at 40 keV, with a dose of 1x1017 ion/cm2 and a current density from 2.5 to 12.5 μA/cm2 were annealed using several pulses from a KrF excimer laser with a single pulse fluence of 0.3 J/cm2. The copper depth distribution, formation and modification of metal nanoparticles under the ion implantation and laser treatment were studied by Rutherford backscattering (RBS), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM) and optical spectroscopy. The metal nucleation, the change in particle size and the possibility for oxidation of the copper particles are examined in the framework of Mie theory.
Original language | English |
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Title of host publication | AIP Conference Proceedings |
Editors | J.L. Duggan, I. Lon Morgan, M. Hall |
Number of pages | 4 |
Volume | 680 |
Publication date | Aug 2003 |
Pages | 601-604 |
ISBN (Print) | 0-7354-0149-7 |
DOIs | |
Publication status | Published - Aug 2003 |
Externally published | Yes |
Event | 17th International Conference on the Application of Accelerators in Research and Industry - Denton, United States Duration: 12 Nov 2002 → 16 Nov 2002 |
Conference
Conference | 17th International Conference on the Application of Accelerators in Research and Industry |
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Country/Territory | United States |
City | Denton |
Period | 12/11/2002 → 16/11/2002 |